EMS TURBO SPUTTER PDF

Grogor For cleaning TEM apertures, a standard molybdenum boat supplied can be fitted. For alternative stages, see Ordering Information. Allows multiple users to input and store coating recipes. For increased source to specimen distance and for coating larger specimens.

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These products are for Research Use Only. Log files include date, time and process parameters. Intelligent system logic automatically detects which insert is in place and displays the appropriate operating settings and controls for that process. System prompts user to confirm target material and it then automatically selects appropriate parameters for that material.

Intuitive software allows the most inexperienced or occasional operator to rapidly enter and store their own process data. For convenience a number of typical sputtering and carbon coating profiles are already stored but also allows the user to create their own.

Software detects failure to achieve vacuum in a set period of time and shuts down the process in case of vacuum leak, which ensures pump protection from overheating.

Automatic, controlled pulsed carbon cord evaporation The carbon evaporation process can be terminated using the optional film thickness monitor, which incorporates a quartz crystal monitor, fitted as standard on E and ES models. This recipe ensures that carbon is evaporated in short controlled pulses, which has two effects: protecting the sample from heating and ensuring the accuracy of the film thickness monitor.

Pulsing also significantly reduces the amount of debris including large carbon fragments associated with traditional carbon "flash" evaporation. Pulsed and ramped carbon rod recipes are supplied as standard. Cool Magnetron Sputtering Sputter coating is a technique widely used in various applications; it is possible to create a plasma and sputter metals with high voltage, poor vacuum and no automation.

However, this is not suitable for electron microscopy applications because it will heat the sample and can result in damage when the plasma interacts with the sample. The Q R Plus series uses low temperature enhanced-plasma magnetrons optimized for the rotary pump pressures, combined with low current and deposition control, which ensures your sample is protected and uniformly coated.

Platinum Pt can also be sputtered with the optional Pt coating vacuum hose assembly. Interchangeable Plug-in Heads This allows the user to configure the system as a sputter coater, evaporator or glow discharge system — all in one space saving format. A carbon cord evaporation insert is available as an option.

Automatic detection of the head type when changed. Detachable chamber with built-in implosion guard Removable glass chamber and easily accessible base and top plate allows for an easy cleaning process. Users can rapidly change the chamber, if necessary, to avoid cross contamination of sensitive samples.

Tall chamber option is available for carbon evaporation to avoid sample heating, to improve uniformity for sputtering and to hold taller samples. Multiple stage options The QR Plus has specimen stages to meet most requirements. All are easy-change, drop-in style no screws and are height adjustable except for the rotary planetary stage.

Height can be pre-set. Tilt and height can be pre-set. Safety The QR Plus meets key industry CE standards: All electronic components are protected by covers Implosion guard prevents user injury in event of chamber failure Vacuum interlocks remove power from deposition sources to prevent user exposure to high voltage in event of chamber being opened Electrical interlocks remove power when source head cover opened Overheating protection shuts down power supply Specifications mm W x mm D x mm H Total height with coating head open is mm Weight Includes features such as a log of the last coatings and reminders for when maintenance is due.

Other stages available on request. The maximum sputtering time is 60 minutes without breaking vacuum and with automatically built-in cooling periods. Carbon evaporation A robust, ripple free DC power supply featuring pulse evaporation ensures reproducible carbon evaporation from cord sources. Current pulse: A current. Visual status indicator A large multi-color status indicator light provides a visual indication of the state of the equipment, allowing users to easily identify the status of a progress at a distance.

The indicator LED shows the following states: Initialization.

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EMS TURBO SPUTTER PDF

Douran For cleaning TEM apertures, a standard molybdenum boat supplied can be fitted. Automatic vacuum control which can be pre-programmed to suit the process and tturbo, therefore removing the need for manual intervention or control. Other stages available on request. Includes manual rod shaper and 3. Glow discharge insert to modify surface properties e.

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Zushicage When not in use the targets are shuttered for protection from contamination. The carbon evaporation process can be terminated using the optional film thickness monitor, which incorporates turgo quartz crystal monitor, fitted as standard on E and ES models. Instrument case mm W x mm D x mm H total height with coating head open: Pulsed and ramped carbon rod recipes are supplied as standard. All are easy-change, drop-in style no screws and are height adjustable except the rotary planetary stage. Automatic, controlled carbon rod evaporation for TEM applications Careful evaporation allows precise control of carbon thickness with or without the optional film thickness monitor.

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